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1                                              MEMS accelerometers--found in most smart phones--can be
2                                              MEMS acoustic sensors have been developed to mimic the h
3                                              MEMS devices was used to monitor adherence for 60 days a
4                                              MEMS fabrication of acoustic wave based biosensors enabl
5 of a transgenic mouse through our compact 2D MEMS neural array (optrodes).
6 uired for optimum biosensor performance; (3) MEMS processing was used to fabricate suitably sized met
7 irect detection of Akhiezer dissipation in a MEMS resonator, which is widely considered to be the ult
8   An active sensing element, consisting of a MEMS microphone, is used to detect the target gas while
9      To address this challenge, we present a MEMS device that leverages the destructive interference
10     Taking on these challenges, we present a MEMS fabrication process that has three main features; (
11                        This paper presents a MEMS resonant pedestal sensor array fabricated over thro
12 m with frequency-dependent stiffness using a MEMS-based capacitive inertial sensor as a case study.
13            We validate this approach using a MEMS-based chemiresistive microsensor array.
14      The broad implementation of such active MEMS has long been constrained by the inability to integ
15 in vitro experimental set-up, (iii) adaptive MEMS process technology because of the dynamic research
16  HF System Post Approval Study; n=1200), and MEMS-HF (CardioMEMS Monitoring Study for Heart Failure;
17 r, fabricated using a CMOS microhotplate and MEMS microphone.
18 ing between near-field thermal radiation and MEMS thermal actuation, we presented the design and mode
19 tions compared 6MP intake by self-report and MEMS.
20 uitable 3D printing techniques required, and MEMS and NEMS to fabricate micro-EFCs.
21                        A typical ormia-based MEMS directional sound sensor possesses two coupled wing
22  provided by traditional semiconductor-based MEMS.
23                      The acoustic wave based MEMS devices reported in the literature as biosensors an
24 per presents a review of acoustic-wave based MEMS devices that offer a promising technology platform
25 per introduces a differential vibrating beam MEMS accelerometer demonstrating excellent long-term sta
26 hese results demonstrate that vibrating beam MEMS accelerometers can be employed for measurements req
27                         In addition, because MEMS manufacturing techniques evolved from the microelec
28  we use gradient stiffness substrates, a bio-MEMS force sensor, and Coulter counter assays to study m
29 ated bio micro-electromechanical system (Bio-MEMS) containing eight gold microelectrodes (uWEs), an i
30 ized as a structural material for biological MEMS, a number of SU-8 properties limit its application
31 s including, but not limited to, biomedical, MEMS, and microelectronics.
32 xpensive, electrochemical technique to build MEMS-like structures that contain several different meta
33 % or more of expected doses were recorded by MEMS.
34           Adherence may be underestimated by MEMS and overestimated by pill count and interview.
35 lmost two decades of efforts on developing C-MEMS and C-NEMS, a review of the relevant progress and a
36 t the developed label-free electrochemical C-MEMS based PDGF-BB aptasensor is highly sensitive, selec
37 th an exposition of future perspectives in C-MEMS and C-NEMS.
38               This review first introduces C-MEMS and C-NEMS fabrication processes that fall into two
39      Carbon microelectromechanical system (C-MEMS) and carbon nanoelectromechanical system (C-NEMS) h
40  on carbon microelectromechanical systems (C-MEMS) was developed for the detection of platelet-derive
41 on treatment was used to functionalize the C-MEMS electrodes, which provided efficient covalent immob
42 allenges and opportunities associated with C-MEMS and C-NEMS devices used in biotech applications are
43 ios for a 10% increase in adherence for CAS, MEMS, pill count, and interview, respectively, were 1.26
44                                   Commercial MEMS fabrication processes are limited to silicon-based
45           The cell manipulation with current MEMS impedance flow cytometry orientations targeting pos
46                                   Currently, MEMS fabrication techniques are primarily based on silic
47 ently functionalized beta-cyclodextrinylated MEMS devices for selective and sensitive detection of fe
48 has been found in case of zinc oxide derived MEMS devices.
49 thermally tuned and electrostatically driven MEMS arch resonator operated in air.
50 ngs indicate the great potential to use dual MEMS direction finding sensor assemblies to locate sound
51 pulsers are individually addressable to each MEMS element and more than 11,000 amplifiers, more than
52 tiction coatings in micro-electromechanical (MEMS) devices and with shrinking dimensions on the nanom
53            Self-reported 6MP intake exceeded MEMS at least some of the time in 84% of patients.
54                                    The fibre MEMS functionality is enabled by an electrostrictive P(V
55 e resisting sensor (FRS), flex sensor (FLS), MEMS accelerometer, and Piezoelectric sensors.
56  of brain tissue presents new challenges for MEMS micro-coil probe fabrication.
57  fine detail could be used for templates for MEMS (micro electro mechanical systems), or their silica
58 adherence: low adherence (less than 75% from MEMS measurements) and high adherence (more than 75% fro
59 ents) and high adherence (more than 75% from MEMS measurements).
60 al capability of the suitably functionalized MEMS devices to selectively detect the presence of femal
61 zoelectric voltage response of the implanted MEMS transducer inside the living cochlea, providing key
62 iction coatings in technologically important MEMS/NEMS devices.
63 rdue University have developed an integrated MEMS-based system, which offers considerable advantages
64    Here, we describe a strategy to interface MEMS sensors with microfluidic platforms through an aero
65 nsors, human-silicon technology interfacing, MEMS, nanorobotics and energy sciences.
66 e micro-electromechanical systems (LIGA-like MEMS) for real-time and label-free detection of specific
67 used for applications in photonic materials, MEMS, biomaterials and self-assembly.
68 ral adherence differed by adherence measure (MEMS, 0.63; pill count, 0.83; interview, 0.93; and CAS,
69 g development, and micro-electro-mechanical (MEMS)-based systems hold great promise to alleviate seve
70                      Microelectromechanical (MEMS) and nanoelectromechanical systems (NEMS) are ideal
71 on waveguides with a microelectromechanical (MEMS) cantilever to apply local strain and spectrally tu
72 rious electrode orientations in microfluidic MEMS flow cytometer technologies for effective manipulat
73 cite several vibration modes of a microplate MEMS resonator and the fundamental mode of a NEMS resona
74                                 A narrowband MEMS direction finding sensor has been developed based o
75 ano and microelectromechanical systems (NEMS/MEMS) are extensively employed for monitoring parameters
76 ine nucleotide levels, and 6MP nonadherence (MEMS-based adherence <95%) associated with the overrepor
77                  This paper presents a novel MEMS-based inertial microswitch design with multi-direct
78 used in fast parallel manufacturing of novel MEMS components, sensors, and optical and optoelectronic
79 ibutes to the design and characterization of MEMS resonators with better performance for telecommunic
80  significant challenge in the development of MEMS gravimeters is maintaining stability over long time
81 In this study, we report on the discovery of MEMS functionality in fibres, thereby opening a path tow
82                  However, the performance of MEMS resonators is constrained by dissipation mechanisms
83 ng, primarily because of the predominance of MEMS processes dedicated to single-crystal silicon, such
84                                   The use of MEMS devices provides an unprecedented control over the
85 lity of our instrument compared to any other MEMS device.
86  measurement employing other resonant-output MEMS devices such as gyroscopes and magnetometers.
87 uded 550 patients implanted with a permanent MEMS-based pressure sensor in the pulmonary artery.
88                                 The reported MEMS device opens up opportunities for further purposes,
89 ning modes using a two-dimensional, resonant MEMS scanner.
90                   Composite adherence score, MEMS values, pill values, and interview values were stat
91                                     Selected MEMS coil devices were validated in vivo using mice and
92 red to be the ultimate limit to Q in silicon MEMS devices.
93 tion and thermal conductivity using a single MEMS device.
94 e Microbial Efficiency-Matrix Stabilization (MEMS) framework.
95 ubstrate, and were micromachined by standard MEMS processes.
96 and micro/nano electromechanical structures (MEMS/NEMS) to fabricate micro-EFCs.
97          The Micro Electromechanical System (MEMS) accelerometer sensor node can be mounted on a rota
98 r array with micro-electromechanical system (MEMS) RF switches to electronically cycle through differ
99 gh-precision micro-electromechanical system (MEMS).
100 for which a Micro Electro Mechanical System (MEMS) based impedance flow cytometry has been proven to
101 ectric (PZ) micro-electro-mechanical system (MEMS).
102 with a CMOS micro-electro-mechanical-system (MEMS) microhotplate for humidity sensing.
103 he large-mass microelectromechanical system (MEMS) and optomechanical cavity have been proposed to re
104  we present a microelectromechanical system (MEMS) device with a sensitivity of 40 microgal per hertz
105 m that uses a microelectromechanical system (MEMS) mirror-based beam-steering.
106  Implementing microelectromechanical system (MEMS) resonators calls for detailed microscopic understa
107  a biomimetic microelectromechanical system (MEMS) sensor capable of measuring water activity in liqu
108 gh-throughput microelectromechanical system (MEMS) technologies, where 150 probes with shanks of eith
109               Microelectromechanical system (MEMS) technology has been used to fabricate DMS devices
110 ties, using a microelectromechanical system (MEMS).
111   We used microelectronic monitoring system (MEMS) caps on participants' capecitabine bottles to reco
112  using a medication event monitoring system (MEMS) device and correlate with glaucoma progression and
113 ing the Medication Events Monitoring System (MEMS) devices, and general glaucoma medication adherence
114          Medication Event Monitoring System (MEMS), pill count, and interview combined into a composi
115 itoring (Medication Event Monitoring System [MEMS]) and identify predictors of overreporting in a coh
116 ll caps (Medication Event Monitoring System [MEMS]) with correction for pocketed doses, analysed by i
117 e developed micro-electromechanical systems (MEMS) sensors, comparable to a single endothelial cell (
118 ng (LiDAR), micro-electromechanical systems (MEMS), medical imaging and 2D/3D printing.
119 tivate micro/nano-electromechanical systems (MEMS/NEMS) resonators at their fundamental and higher or
120 n array of micro-electro-mechanical systems (MEMS) resonant mass sensors that can be used to directly
121 ated using micro-electro-mechanical systems (MEMS) techniques, consisted of an array of four piezoele
122 of various Micro Electro Mechanical Systems (MEMS), such as resonators.
123 ation of microelectrical-mechanical systems (MEMS).
124 ity [as in Micro Electro-Mechanical Systems (MEMS)].
125 hrough the micro-electro-mechanical-systems (MEMS) actuation.
126 ) based on Micro-Electro-Mechanical-Systems (MEMS) were designed to deliver spatial repellents that r
127              Microelectromechanical systems (MEMS) are the basis of many rapidly growing technologies
128 tanate (PZT) microelectromechanical systems (MEMS) based stress-optic actuation.
129 d autonomous microelectromechanical systems (MEMS) become distributed and smaller, there is an increa
130              Microelectromechanical systems (MEMS) enable many modern-day technologies, including act
131              Microelectromechanical systems (MEMS) have enabled the development of a new generation o
132 hnology, and microelectromechanical systems (MEMS) have fostered many exciting biosensors and bioactu
133              Microelectromechanical systems (MEMS) incorporating active piezoelectric layers offer in
134          The microelectromechanical systems (MEMS) mirror was designed based on the principle of para
135              Microelectromechanical systems (MEMS) resonant sensors provide a high degree of accuracy
136      Silicon Microelectromechanical Systems (MEMS) resonators have broad commercial applications for
137 equency (RF) microelectromechanical systems (MEMS) switch that involve optical and electrical functio
138 icated using microelectromechanical systems (MEMS) techniques.
139 icated using microelectromechanical systems (MEMS) technology containing an array of microfabricated
140 ivo, we used microelectromechanical systems (MEMS) technology to generate arrays of microtissues cons
141 ilicon-based microelectromechanical systems (MEMS) ultrasonic sensors directly integrated into comple
142 ponents into microelectromechanical systems (MEMS), and implantable devices will need to be built fro
143 ft robotics, microelectromechanical systems (MEMS), and robotic materials can greatly improve their f
144 es, sensors, microelectromechanical systems (MEMS), human-computer interfacing, nanorobotics, and tou
145 e for use in microelectromechanical systems (MEMS), logic elements, and environmental energy harvesti
146 antennas and microelectromechanical systems (MEMS)-actuated optical switches are monolithically integ
147  of titanium microelectromechanical systems (MEMS).
148      Using a microelectromechanical-systems (MEMS) platform, stress-strain response curves up to fail
149 ation using Micro-Electro-Mechanical Systems(MEMS) technology for high throughput chemical or biologi
150 rds flexible, high-aspect ratio, and textile MEMS.
151 "overreporters" (self-report was higher than MEMS by >/=5 days/month for >/=50% of study months), and
152                                          The MEMS gravimeter module demonstrates an output Allan devi
153                                          The MEMS inertial microswitch micro-fabricated by surface mi
154 f an LC tank resonant circuit to actuate the MEMS/NEMS resonator.
155                           Sensitivity of the MEMS devices towards the olive pheromone was found to be
156                                   Two of the MEMS devices, silicon dioxide surface-micromachined cant
157 rations are forcefully passed through to the MEMS Gas Sensor-MISC-2714 and Multichannel Gas sensor.
158 -fibre thermal drawing process, in which the MEMS architecture and materials are embedded into a pref
159         The method used for generating these MEMS fibres leverages a preform-to-fibre thermal drawing
160          The small size and low cost of this MEMS gravimeter suggests many applications in gravity ma
161           This result demonstrates that this MEMS gravimeter is capable of conducting long-term time-
162 rocess permits the creation of bulk titanium MEMS, which offers potential for the use of a set of mat
163                      The proposed ultrasonic MEMS-based blood glucometer measures a glucose level of
164 k acoustic resonator (FBAR) is a widely-used MEMS device which can be used as a filter, or as a gravi
165 surements have recently been conducted using MEMS (microelectromechanical systems) sensors.
166 ter) fabricated on a silicon substrate using MEMS (microelectromechanical systems) microfabrication t
167                                 The variable MEMS capacitive device is able to detect and forecast bl
168 res for microfluidic cooling of chips, vias, MEMS, photovoltaic applications and photonic devices tha
169  Methods of integration of the acoustic wave MEMS devices in the microfluidic systems and functionali
170 o evaluate glaucoma treatment adherence with MEMS devices and correlate adherence rates with glaucoma
171 "perfect reporters" (self-report agreed with MEMS), "overreporters" (self-report was higher than MEMS
172 sesses advantages of high compatibility with MEMS and can be applied to other nanothermite systems ea
173 tter advantages including compatibility with MEMS processes on wafer and easy replication.
174 and on-chip uses that can be integrated with MEMS or CMOS in a single chip.
175  the integration of spray microfluidics with MEMS.

 
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