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1 t regardless of substrate (e.g., Si, Au, and silicon nitride).
2 ck-etched to span a 800-nm-thick membrane of silicon nitride.
3 magnitude larger than that in stoichiometric silicon nitride.
4 R) plasmons and IR active optical phonons in silicon nitride.
5 he biologically effective characteristics of silicon nitride.
7 ion between the LPS on these strains and the silicon nitride AFM tip were measured, and the Alexander
8 study, the wetting properties of silicon and silicon nitride AFM tips are investigated through dynami
15 signing analogues of freeform optics using a silicon nitride based metasurface platform for operation
16 Many solid oxides and nitrides, particularly silicon nitride-based materials such as M(2)Si(5)N(8) an
20 mbinant polymers were shown to adsorb to the silicon-nitride chip window from the buffered saline sol
21 ter-scale, MHz free spectral range, low loss silicon nitride coil resonator with the potential to sca
22 d for diamond grown on oxygen plasma treated silicon nitride, demonstrating it to be of the least str
23 ces can be fabricated reliably from a 200-nm silicon nitride device layer using a lithography-based p
25 ng the chemistry of bimolecular reactions of silicon nitride diatomics in chemical vapor deposition t
26 experimentally by measuring the thickness of silicon nitride film deposited in several increments on
27 ich can generally be applied to an arbitrary silicon nitride film thickness, is based on the simultan
28 trate anomalous dispersion in a 300 nm thick silicon nitride film, suitable for semiconductor manufac
30 formance ever reported in the literature for silicon nitride grating couplers without the use of any
33 of silver nanoparticle nucleation at a water-silicon nitride interface showed apparently randomly loc
36 y by a magnet, and a nanoscale knife made of silicon nitride is manipulated to contact, bend and scan
38 ein microcrystals deposited on an ultra-thin silicon nitride membrane and embedded in a preservation
39 anol molecular species on the surface of the silicon nitride membrane and the ionic species in soluti
40 pical simulated system included a patch of a silicon nitride membrane dividing water solution of pota
41 rticles in aircraft plumes were performed on silicon nitride membrane grids using transmission electr
42 ispersed in water and moving adjacent to the silicon nitride membrane of a commercial LC in a broad r
45 5- or 10- microm aperture in a 500-nm thick silicon nitride membrane to localize and limit transmitt
46 etre-diameter pore, sputtered through a thin silicon nitride membrane, can be used to detect the prim
49 By using nanopores fabricated in 20 nm-thin silicon nitride membranes and highly sensitive electrica
50 for derivatization of nanopores drilled into silicon nitride membranes facilitates control over ion a
51 and electron-beam lithography and tuning of silicon nitride membranes have emerged as three promisin
52 rication process to grow and define circular silicon nitride membranes on glass chips that successful
53 gly, nanophotonic lightsails based on planar silicon nitride membranes patterned with suitable optica
54 rce and a cold drain (both are ~250 nm-thick silicon nitride membranes), which are analogous to the s
62 cell culture is equipped with an array of 16 silicon nitride micropipet-based ion-selective microelec
63 the third-order (chi((3))) nonlinearity in a silicon nitride microresonator, produces output signal a
65 tion--to be realized with small air holes in silicon nitride (n = 2.02), and even glass (n = 1.45).
68 Using a directional coupler implemented with silicon nitride nanophotonic waveguides, we observe 97%
69 of the ion current through hafnium oxide and silicon nitride nanopores allow the analysis of sub-30 k
72 nt, based on thermomechanical measurement of silicon nitride nanostrings, represents the highest mass
73 ingle-side polished) coated with 1 microm of silicon nitride on both sides are patterned and etched t
74 little loading effect during the etching of silicon nitride on oxide/nitride stack wafer with simila
75 l time using a high-finesse micrometre-scale silicon nitride optical cavity as a sensitive photonic m
76 experimentally demonstrate entrainment of a silicon-nitride optomechanical oscillator driven up to t
77 rt an optically transparent carbon electrode-silicon nitride (OTCE-SiN(x)) window platform fabricated
81 ble process comprising III-V semiconductors, silicon nitride photonic integrated circuits, and 130-nm
83 Mach-Zehnder interferometer (MZI) based on a silicon nitride platform combined with a microfluidic sy
84 tegration of this phase change material in a silicon nitride platform using a microring resonator tha
85 ncy exceeding - 0.45 dB for the 400 nm thick silicon nitride platform) with relaxed fabrication toler
88 tions were carried out considering different silicon nitride platforms with 150, 300, 400 and 500 nm
92 r the first time through the reaction of the silicon nitride radical (SiN) with acetylene (C(2)H(2))
94 ere able to study the notoriously refractory silicon nitride radical in reaction with ethylene under
96 chnology based on piezoelectrically actuated silicon nitride resonant waveguide gratings fabricated o
97 ted dispersion, and resonance linewidths for silicon nitride resonators excited with lasers operating
98 ign a two-dimensional lattice of 261 coupled silicon nitride ring resonators that supports nested mod
102 nsing layer to minimise post-processing, and Silicon Nitride (Si(3)N(4)) is the most common material
103 P/Si) semiconductor lasers and ultralow-loss silicon nitride (Si(3)N(4)) microresonators on a monolit
104 le SARS-CoV-2 testing was demonstrated using silicon nitride (Si(3)N(4)) nanoslot fluidic waveguides
105 between pathogenic L. monocytogenes EGDe and silicon nitride (Si(3)N(4)) were measured using atomic f
106 ol, nuclear targets are created using PAD on silicon nitride (Si(3)N(4)) windows with silicon frames.
107 calable and controllable method to fabricate silicon nitride (Si(x)N(y)) membranes with effective thi
109 irst time that an optimized biomedical grade silicon nitride (Si3N4) demonstrated cell adhesion and i
110 nt types of surface, silicon dioxide (SiO2), silicon nitride (Si3N4), and titanium oxynitride (TiON)
112 ure was fabricated with silicon oxide (SiO2)/silicon nitride (Si3N4)/silicon oxide on a p-type silico
114 near-field radiation between silica-silica, silicon nitride-silicon nitride and gold-gold surfaces t
115 ngsten, silicon, germanium, silicon dioxide, silicon nitride, silk and synthetic polymers) used in th
118 or of cytochrome c (cyt c) through ultrathin silicon nitride (SiN(x)) solid-state nanopores of diamet
120 abricated on mid-IR transparent silicon-rich silicon nitride (SiN(x)) thin films through complementar
123 -timescale lattice of commercially available silicon nitride (SiN) coupled ring resonators for harmon
124 f room-temperature single-photon emitters in silicon nitride (SiN) films grown on silicon dioxide sub
125 on a silicon dioxide (SiO2)/Si substrate, a silicon nitride (SiN) membrane, and a suspended architec
127 es fabricated by focused ion beam milling of silicon nitride (SiN) membranes, enabling the reproducib
128 ricated by focused ion beam (FIB) milling of silicon nitride (SiN) membranes, with 100 pores in a hex
130 This is achieved through the reaction of the silicon nitride (SiN) radical with 1,3-butadiene (C(4)H(
131 om, i.e. shifting from the cyano (CN) to the silicon nitride (SiN) radical, has a dramatic influence
132 an optical isolator based on a pass-through silicon nitride (SiN) ring resonator integrating the opt
133 ng across a bonded interface consisting of a silicon nitride (SiN) waveguide and a beta barium borate
134 upling of a [Formula: see text] thick N-rich silicon nitride (SiN) waveguide with a [Formula: see tex
135 Mid-infrared (mid-IR) sensors consisting of silicon nitride (SiN) waveguides were designed and teste
137 structure - cyano (CN), boron monoxide (BO), silicon nitride (SiN), and ethynyl (C2H), and their reac
139 e first time how an atomically thin (0.4 nm) silicon nitride (SiNx) interlayer helps in maintaining/i
140 to surface stresses and thus is embedded in silicon nitride so as to avoid direct contact with the s
143 ers are co-self-injection locked to a single silicon nitride spiral resonator to provide a record-hig
145 ect transistor (FET) through deposition of a silicon nitride stress liner that warps both the gate an
146 ical deformation of up to 20 nanometres in a silicon nitride structure, using three milliwatts of con
147 copy to detect the remote Joule heating of a silicon nitride substrate by a single multiwalled carbon
148 ovide control over the surface charge of the silicon nitride substrate through modification of the su
151 es between the metallic/oxide phases and the silicon nitride support, alongside the redox reactions o
152 at were present when a bond formed between a silicon nitride surface (atomic force microscopy tip) an
158 nocrystalline diamond thin films on modified silicon nitride, under CVD conditions, produced coalesce
159 Bandgap engineering of non-stoichiometric silicon nitride using state-of-the-art fabrication techn
163 compact light delivery system, consisting of silicon nitride waveguides and grating couplers for out-
165 ation of III-V gain medium and ultralow-loss silicon nitride waveguides with optical loss around 0.5
166 at microwave line rates(3-5), ultralow-loss silicon nitride waveguides(6,7), and high-speed on-chip