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   1                                              MEMS accelerometers--found in most smart phones--can be 
     2                                              MEMS fabrication of acoustic wave based biosensors enabl
  
     4 uired for optimum biosensor performance; (3) MEMS processing was used to fabricate suitably sized met
  
  
  
  
  
  
    11 per presents a review of acoustic-wave based MEMS devices that offer a promising technology platform 
  
    13  we use gradient stiffness substrates, a bio-MEMS force sensor, and Coulter counter assays to study m
    14 ized as a structural material for biological MEMS, a number of SU-8 properties limit its application 
    15 xpensive, electrochemical technique to build MEMS-like structures that contain several different meta
  
  
    18 ios for a 10% increase in adherence for CAS, MEMS, pill count, and interview, respectively, were 1.26
  
  
  
    22 ngs indicate the great potential to use dual MEMS direction finding sensor assemblies to locate sound
  
  
    25  fine detail could be used for templates for MEMS (micro electro mechanical systems), or their silica
    26 rdue University have developed an integrated MEMS-based system, which offers considerable advantages 
    27    Here, we describe a strategy to interface MEMS sensors with microfluidic platforms through an aero
  
  
    30 ral adherence differed by adherence measure (MEMS, 0.63; pill count, 0.83; interview, 0.93; and CAS, 
    31 g development, and micro-electro-mechanical (MEMS)-based systems hold great promise to alleviate seve
  
  
    34 ine nucleotide levels, and 6MP nonadherence (MEMS-based adherence <95%) associated with the overrepor
  
    36 used in fast parallel manufacturing of novel MEMS components, sensors, and optical and optoelectronic
    37 In this study, we report on the discovery of MEMS functionality in fibres, thereby opening a path tow
    38 ng, primarily because of the predominance of MEMS processes dedicated to single-crystal silicon, such
  
  
  
  
  
  
  
  
    47 he large-mass microelectromechanical system (MEMS) and optomechanical cavity have been proposed to re
    48  we present a microelectromechanical system (MEMS) device with a sensitivity of 40 microgal per hertz
    49   We used microelectronic monitoring system (MEMS) caps on participants' capecitabine bottles to reco
    50 ing the Medication Events Monitoring System (MEMS) devices, and general glaucoma medication adherence
  
    52 itoring (Medication Event Monitoring System [MEMS]) and identify predictors of overreporting in a coh
    53 ll caps (Medication Event Monitoring System [MEMS]) with correction for pocketed doses, analysed by i
    54 e developed micro-electromechanical systems (MEMS) sensors, comparable to a single endothelial cell (
    55 n array of micro-electro-mechanical systems (MEMS) resonant mass sensors that can be used to directly
  
  
  
    59 ) based on Micro-Electro-Mechanical-Systems (MEMS) were designed to deliver spatial repellents that r
  
    61 d autonomous microelectromechanical systems (MEMS) become distributed and smaller, there is an increa
  
  
  
  
  
    67 equency (RF) microelectromechanical systems (MEMS) switch that involve optical and electrical functio
  
    69 ivo, we used microelectromechanical systems (MEMS) technology to generate arrays of microtissues cons
    70 ponents into microelectromechanical systems (MEMS), and implantable devices will need to be built fro
    71 es, sensors, microelectromechanical systems (MEMS), human-computer interfacing, nanorobotics, and tou
    72 e for use in microelectromechanical systems (MEMS), logic elements, and environmental energy harvesti
  
  
    75 ation using Micro-Electro-Mechanical Systems(MEMS) technology for high throughput chemical or biologi
  
    77 "overreporters" (self-report was higher than MEMS by >/=5 days/month for >/=50% of study months), and
  
    79 -fibre thermal drawing process, in which the MEMS architecture and materials are embedded into a pref
  
  
    82 rocess permits the creation of bulk titanium MEMS, which offers potential for the use of a set of mat
    83 k acoustic resonator (FBAR) is a widely-used MEMS device which can be used as a filter, or as a gravi
    84 ter) fabricated on a silicon substrate using MEMS (microelectromechanical systems) microfabrication t
  
    86 res for microfluidic cooling of chips, vias, MEMS, photovoltaic applications and photonic devices tha
    87  Methods of integration of the acoustic wave MEMS devices in the microfluidic systems and functionali
    88 "perfect reporters" (self-report agreed with MEMS), "overreporters" (self-report was higher than MEMS
    89 sesses advantages of high compatibility with MEMS and can be applied to other nanothermite systems ea
  
  
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